We have developed a software that enables the straightforward measurement of in-plane linear displacements of MicroElectroMechanical Systems (MEMS) using videos recorded with a CCD camera attached to a microscope.

→ Journal article associated with this research [JMEMS Letters, J. Microelectromech. Syst. 19 (5), pp. 1273-1275, 2010].

The software (nano+)

is available free of charge at this URL: http://christophe.yamahata.fr/nanoplus/

Presentation given at the 16^th International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers'11, Beijing, China).